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Harmonic Analysis of Microbeams with PZT on-Chip Actuating and Sensing

Authors :
Thomas Gessner
Mario Baum
Jia Zhou
Yiping Huang
Ralf Schmiedel
Gang Ruan
Publica
Publication Year :
2003

Abstract

Two groups of microbeams with different top electrode patterns are designed as PZT on-chip actuating and sensing devices. The results of hamonic analysis reveal that such microbeams present high Qs (>500 in air) in certain ranges of frequency, which provides the design basis for various applications.

Subjects

Subjects :
Materials science
business.industry
Nanotechnology
Microbeam
Condensed Matter Physics
Electronic, Optical and Magnetic Materials
Harmonic analysis
Control and Systems Engineering
Electrode
Materials Chemistry
Ceramics and Composites
Optoelectronics
Electrical and Electronic Engineering
business

Details

Language :
English
Database :
OpenAIRE
Accession number :
edsair.doi.dedup.....8d791313891b94729c7bdd9674c522fe

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