High-Thermal-Conductivity SiC Ceramic Mirror for High-Average-Power Laser System

The importance of heat-resistant optics is increasing together with the average power of high-intensity lasers. A silicon carbide (SiC) ceramic with high thermal conductivity is proposed as an optics substrate to suppress thermal effects. The temperature rise of the substrate and the change in the surface accuracy of the mirror surface, which degrades the laser beam quality, are investigated. Gold mirrors on synthetic fused silica and SiC ceramic substrates are heated with a 532 nm wavelength laser diode. The synthetic fused silica substrate placed on an aluminum block shows a temperature increase by ~32 &deg
C and a large temperature gradient. In contrast, the SiC ceramic substrate shows a uniform temperature distribution and a temperature increase of only ~4 &deg
C with an absorbed power of ~2 W after 20 min laser irradiation. The surface accuracy (roughness) when using the synthetic fused silica substrate changes from /21.8 (29.0 nm) to /7.2 (88.0 nm), increasing by a factor of ~3.0. However, that of the SiC ceramic substrate changes from /21.0 (30.2 nm) to /13.3 (47.7 nm), increasing by only a factor of ~1.6. Based on these experimental results, detailed considerations and calculations of actively cooled SiC ceramic substrates for high-average-power laser systems are also discussed.