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High-throughput patterning of photonic structures with tunable periodicity
- Source :
- Proceedings of the National Academy of Sciences of the United States of America, vol 112, iss 17
- Publication Year :
- 2015
-
Abstract
- A patterning method termed "RIPPLE" (reactive interface patterning promoted by lithographic electrochemistry) is applied to the fabrication of arrays of dielectric and metallic optical elements. This method uses cyclic voltammetry to impart patterns onto the working electrode of a standard three-electrode electrochemical setup. Using this technique and a template stripping process, periodic arrays of Ag circular Bragg gratings are patterned in a high-throughput fashion over large substrate areas. By varying the scan rate of the cyclically applied voltage ramps, the periodicity of the gratings can be tuned in situ over micrometer and submicrometer length scales. Characterization of the periodic arrays of periodic gratings identified point-like and annular scattering modes at different planes above the structured surface. Facile, reliable, and rapid patterning techniques like RIPPLE may enable the high-throughput and low-cost fabrication of photonic elements and metasurfaces for energy conversion and sensing applications.
- Subjects :
- nanopattern
Multidisciplinary
Materials science
Working electrode
Fabrication
business.industry
Ripple
photonics
silicon
Physics::Optics
Nanotechnology
Micrometre
Nanolithography
electrochemistry
Affordable and Clean Energy
Physical Sciences
nanofabrication
Optoelectronics
Cyclic voltammetry
Photonics
business
Lithography
Subjects
Details
- ISSN :
- 10916490
- Volume :
- 112
- Issue :
- 17
- Database :
- OpenAIRE
- Journal :
- Proceedings of the National Academy of Sciences of the United States of America
- Accession number :
- edsair.doi.dedup.....87d51adcb65e06be8ba63735f79ac42e