Superconducting Polycrystalline Silicon Layer Obtained by Boron Implantation and Nanosecond Laser Annealing

MLA

Sebastien Kerdiles, et al. Superconducting Polycrystalline Silicon Layer Obtained by Boron Implantation and Nanosecond Laser Annealing. Jan. 2021. EBSCOhost, https://doi.org/10.1149/2162-8777/abdc41⟩.

APA

Sebastien Kerdiles, F. Lefloch, Christophe Marcenat, P. Acosta Alba, Richard Daubriac, S. Lequien, T. D. Vethaak, & Fabrice Nemouchi. (2021). Superconducting Polycrystalline Silicon Layer Obtained by Boron Implantation and Nanosecond Laser Annealing. https://doi.org/10.1149/2162-8777/abdc41⟩

Chicago

Sebastien Kerdiles, F. Lefloch, Christophe Marcenat, P. Acosta Alba, Richard Daubriac, S. Lequien, T. D. Vethaak, and Fabrice Nemouchi. 2021. “Superconducting Polycrystalline Silicon Layer Obtained by Boron Implantation and Nanosecond Laser Annealing,” January. doi:10.1149/2162-8777/abdc41⟩.