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Surface enhanced thermo lithography

Authors :
Francesco Gentile
Vincenzo Mollace
Roksana Majewska
Gerardo Perozziello
Marianna Barberio
Simon Bonanni
Enzo Di Fabrizio
Patrizio Candeloro
Elisabetta Dattola
Alessandro Alabastri
Maria Laura Coluccio
Coluccio, Maria Laura
Alabastri, Alessandro
Bonanni, Simon
Majewska, Roksana
Dattola, Elisabetta
Barberio, Marianna
Candeloro, Patrizio
Perozziello, Gerardo
Mollace, Vincenzo
Di Fabrizio, Enzo
Gentile, Francesco
Source :
Microelectronic Engineering. 174:52-58
Publication Year :
2017
Publisher :
Elsevier BV, 2017.

Abstract

We used electroless deposition to fabricate clusters of silver nanoparticles (NPs) on a silicon substrate. These clusters are plasmonics devices that induce giant electromagnetic (EM) field increments. When those EM field are absorbed by the metal NPs clusters generate, in turn, severe temperature increases. Here, we used the laser radiation of a conventional Raman set-up to transfer geometrical patterns from a template of metal NPs clusters into a layer of thermo sensitive Polyphthalaldehyde (PPA) polymer. Temperature profile on the devices depends on specific arrangements of silver nanoparticles. In plane temperature variations may be controlled with (i) high nano-meter spatial precision and (ii) single Kelvin temperature resolution on varying the shape, size and spacing of metal nanostructures. This scheme can be used to generate strongly localized heat amplifications for applications in nanotechnology, surface enhanced thermo-lithography (SETL), biology and medicine (for space resolved cell ablation and treatment), nano-chemistry. Display Omitted We used electroless deposition to fabricate clusters of silver nanoparticles.These clusters are plasmonics devices that induce giant electromagnetic (EM) field increments.When those EM field are absorbed by metal NPs generate severe temperature increases.Here, we realized a thermo-lithography of a polymer assisted by bi-dimensional photonics structures.We used a Raman set-up to transfer geometrical patterns into a layer of thermo sensitive polymer.

Details

ISSN :
01679317
Volume :
174
Database :
OpenAIRE
Journal :
Microelectronic Engineering
Accession number :
edsair.doi.dedup.....86d394ae087123b1599bffaafec7e445