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Fabrication of graphene nanoribbon by local anodic oxidation lithography using atomic force microscope
- Publication Year :
- 2008
-
Abstract
- We conducted local anodic oxidation (LAO) lithography in single-layer, bilayer, and multilayer graphene using tapping-mode atomic force microscope. The width of insulating oxidized area depends systematically on the number of graphene layers. An 800-nm-wide bar-shaped device fabricated in single-layer graphene exhibits the half-integer quantum Hall effect. We also fabricated a 55-nm-wide graphene nanoribbon (GNR). The conductance of the GNR at the charge neutrality point was suppressed at low temperature, which suggests the opening of an energy gap due to lateral confinement of charge carriers. These results show that LAO lithography is an effective technique for the fabrication of graphene nanodevices.<br />4 pages, 4 figures
- Subjects :
- Fabrication
Materials science
Physics and Astronomy (miscellaneous)
Condensed Matter - Mesoscale and Nanoscale Physics
Graphene
business.industry
Band gap
Bilayer
FOS: Physical sciences
Quantum Hall effect
law.invention
Nanolithography
law
Mesoscale and Nanoscale Physics (cond-mat.mes-hall)
Optoelectronics
Charge carrier
business
Lithography
Subjects
Details
- Language :
- English
- Database :
- OpenAIRE
- Accession number :
- edsair.doi.dedup.....861170376a1c3cfd4999795a518f741c