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Self-assembled SiGe dots
- Source :
- SPIE Proceedings.
- Publication Year :
- 2005
- Publisher :
- SPIE, 2005.
-
Abstract
- We review recent progress in the growth and characterization of Si1-xGex islands and Ge dots on (001) Si. We discuss the evolution of the island morphology with Si1-xGex coverage, and the effect of growth parameters or post-growth annealing on the shape of the islands and dots. We outline some of the structural, and optical properties of Si1-xGex islands and review recent progress in the determination of their composition and strain distribution. We describe the use of undulated Si1-xGex islands superlattices for infrared detection at telecommunication wavelengths. We discuss various approaches currently being investigated to engineer Si1-xGex quantum dots and in particular control their size, density and spatial distribution. For example, we show how C pre-deposition on Si (001) can influence nucleation and growth of Ge islands. We also show how low temperature Si homoepitaxy can lead to a particular surface cusp morphology that may promote dot nucleation.<br />Quantum sensing and nanophotonic devices II, 23-27 January 2005, San Jose, California, USA
Details
- ISSN :
- 0277786X
- Database :
- OpenAIRE
- Journal :
- SPIE Proceedings
- Accession number :
- edsair.doi.dedup.....82721f6732f100e8783a3ebff44b8e81