Vibration-immune high-sensitivity profilometer built with the technique of composite interferometry

A prototype of a profilometer was built with the technique of composite interferometry for measurement of the distribution of both the amplitude and phase information of the surface of a material simultaneously. The composite interferometer was composed of a Michelson interferometer for measuring the surface profile of the sample and a Mach–Zehnder interferometer for measuring the phase deviation caused by the scanning component and environmental perturbations. A high-sensitivity surface profile can be obtained by use of the phase compensation mechanism through subtraction of the phases of the interferograms detected in the two interferometers. With the new design and improvement of robustness of the optical system, the measurement speed and accuracy were significantly improved. Furthermore, an additional optical delay component results in a higher sensitivity of the interference signal. This prototype of vibration-immune profilometer was examined to have a displacement sensitivity of 0.64 nm.