Compact relative humidity sensor based on an Agarose hydrogel coated silica microsphere resonator

In this paper, we propose a novel approach to measurements of low relative humidity (RH) levels based on the whispering gallery modes (WGMs) phenomenon in a silica microsphere resonator coated with Agarose. The spectral dips of the WGM resonances excited in the proposed sensor depend strongly on the changes in the refractive index (RI) of the coating material as well as the surrounding RI. A study of the humidity-induced RI changes in a thin Agarose layer, applied to the surface of a 162 μm-diameter silica microsphere was carried out by correlating the experimental results and numerical simulations performed using the perturbation theory. We experimentally demonstrate a linear sensing characteristic in a low-humidity range from 10% to 45% RH. The estimated quality factor of the micro-resonator is 2.82×106 and detection limit for the sensor is 0.057% RH, corresponding to the RI resolution of 8.4× 10−7 RIU.