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Ferroelectric HfZrOx FETs on SOI Substrate With Reverse-DIBL (Drain-Induced Barrier Lowering) and NDR (Negative Differential Resistance)

Authors :
H.-Y. Chen
C.-Y. Liao
Ming-Han Liao
Shu-Tong Chang
Zheng-Ying Wang
Yu-Chen Chou
Ruo-Chun Hong
Min-Hung Lee
C. Lo
Pin-Guang Chen
Siang-Sheng Gu
Shih-Yao Chen
Kai-Shin Li
Kuan-Ting Chen
Gao-Yu Siang
Source :
IEEE Journal of the Electron Devices Society, Vol 6, Pp 900-904 (2018)
Publication Year :
2018
Publisher :
IEEE, 2018.

Abstract

Ferroelectric-Hf1-xZrxO2 FETs on silicon on insulator (SOI) are modeled and demonstrated with improvement on subthreshold swing (SS) and hysteresis (VT-shift), which is based on the capacitance matching concept. The minimum reverse SS = 45 mV/dec and 52 mV/dec are obtained experimentally for SOI and bulk-Si, respectively. The steep SS range (

Details

Language :
English
ISSN :
21686734
Volume :
6
Database :
OpenAIRE
Journal :
IEEE Journal of the Electron Devices Society
Accession number :
edsair.doi.dedup.....8003e310c78d3208cac7654f7280a3f5