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Interferometric methods for static and dynamic characterizations of micromembranes for sensing functions
- Source :
- Proc. of SPIE, Photonics Europe 2004, Optical Micro-and Nanometrology in Manufacturing Technology, MEMS Characterization I, 29–30 april 2004, tome 5458, Proceedings of SPIE-The International Society for Optical Engineering
- Publication Year :
- 2004
- Publisher :
- HAL CCSD, 2004.
-
Abstract
- We present a methodology for static and dynamic testing of mechanical properties of microelements. The measurement path includes temporal phase shifting interferometry for quantitative static shape elements analysis. This is followed by determination of the resonance frequency by means of modified time average interferometry and transient amplitude and phase maps of vibrating micromembrane capturing and evaluation by phase shifting stroboscopic interferometry. Proper application of combination of these methods allows for quick and accurate analysis of micromembranes and optimization of their manufacturing conditions.<br />NA
- Subjects :
- Engineering
business.industry
Phase (waves)
Electrical and electronic engineering
Optics
01 natural sciences
Stroboscope
010309 optics
Vibration
Interferometry
Amplitude
Electronic speckle pattern interferometry
0103 physical sciences
MEMS/MOEMS
Microelements
Microinterferometry
Optical metrology
Vibration analysis
Transient (oscillation)
business
010301 acoustics
Dynamic testing
Subjects
Details
- Language :
- English
- Database :
- OpenAIRE
- Journal :
- Proc. of SPIE, Photonics Europe 2004, Optical Micro-and Nanometrology in Manufacturing Technology, MEMS Characterization I, 29–30 april 2004, tome 5458, Proceedings of SPIE-The International Society for Optical Engineering
- Accession number :
- edsair.doi.dedup.....7fcc87f99c385656dd71afdda2b93184