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Dual Resonator MEMS Magnetic Field Gradiometer
- Source :
- Sensors, Volume 19, Issue 3, Sensors, Vol 19, Iss 3, p 493 (2019), Sensors (Basel, Switzerland)
- Publication Year :
- 2019
- Publisher :
- MDPI AG, 2019.
-
Abstract
- Accurate knowledge of the spatial magnetic field distribution is necessary when measuring field gradients. Therefore, a MEMS magnetic field gradiometer is reported, consisting of two identical, but independent laterally oscillating masses on a single chip. The sensor is actuated by Lorentz force and read out by modulation of the light flux passing through stationary and moving arrays of the chip. This optical readout decouples the transducer from the electronic components. Both phase and intensity are recorded which reveals information about the uniformity of the magnetic field. The magnetic flux density is measured simultaneously at two points in space and the field gradient is evaluated locally. The sensor was characterised at ambient pressure by performing frequency and magnitude response measurements with coil and various different permanent magnet arrangements, resulting in a responsivity of 35.67 V/T and detection limit of 3.07 &micro<br />T/ Hz (@ 83 Hz ENBW). The sensor is compact, offers a large dynamic measurement range and can be of low-cost by using conventional MEMS batch fabrication technology.
- Subjects :
- Frequency response
Field (physics)
magnetic field
02 engineering and technology
lcsh:Chemical technology
7. Clean energy
01 natural sciences
Biochemistry
Article
Gradiometer
Analytical Chemistry
Lorentz force
symbols.namesake
Optics
sensor
lcsh:TP1-1185
Electrical and Electronic Engineering
Instrumentation
Physics
optical readout
business.industry
010401 analytical chemistry
021001 nanoscience & nanotechnology
Atomic and Molecular Physics, and Optics
0104 chemical sciences
Magnetic field
MEMS
Transducer
Electromagnetic coil
Magnet
symbols
0210 nano-technology
business
Subjects
Details
- ISSN :
- 14248220
- Volume :
- 19
- Database :
- OpenAIRE
- Journal :
- Sensors
- Accession number :
- edsair.doi.dedup.....7e22b83e6622f92aec21728d305c6d23