Determination of Bulk Mismatch Values in Heterostructures' by TEM/CBED

Using isotropic elasticity theory it is possible to determine the bulk mismatch in thinned, cross-sectioned heterostructures, where a relaxation occurs along the thinning direction. This is accomplished by measuring, in the central disk of a single Convergent Beam Electron Diffraction (CBED) pattern, the position of the High Order Laue Zone lines, which are sensitive to lattice parameters along different crystallographic directions. The results obtained in both uniform and graded Sil-xGex/Si heterostructures are in good agreement with bulk values deduced from independent techniques.