A wafer-like apparatus for two-dimensional measurement of plasma parameters and temperature distribution in low-temperature plasmas

MLA

Chin-Wook Chung, et al. “A Wafer-like Apparatus for Two-Dimensional Measurement of Plasma Parameters and Temperature Distribution in Low-Temperature Plasmas.” The Review of Scientific Instruments, vol. 92, no. 5, July 2021. EBSCOhost, widgets.ebscohost.com/prod/customlink/proxify/proxify.php?count=1&encode=0&proxy=&find_1=&replace_1=&target=https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&scope=site&db=edsair&AN=edsair.doi.dedup.....7ae1382f8c23ec17214cf781254d5075&authtype=sso&custid=ns315887.

APA

Chin-Wook Chung, Hyundong Eo, Yeong-Min Lim, Kyung-Hyun Kim, & Moo-Young Lee. (2021). A wafer-like apparatus for two-dimensional measurement of plasma parameters and temperature distribution in low-temperature plasmas. The Review of Scientific Instruments, 92(5).

Chicago

Chin-Wook Chung, Hyundong Eo, Yeong-Min Lim, Kyung-Hyun Kim, and Moo-Young Lee. 2021. “A Wafer-like Apparatus for Two-Dimensional Measurement of Plasma Parameters and Temperature Distribution in Low-Temperature Plasmas.” The Review of Scientific Instruments 92 (5). http://widgets.ebscohost.com/prod/customlink/proxify/proxify.php?count=1&encode=0&proxy=&find_1=&replace_1=&target=https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&scope=site&db=edsair&AN=edsair.doi.dedup.....7ae1382f8c23ec17214cf781254d5075&authtype=sso&custid=ns315887.