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Controlling surface effects in extremely high aspect ratio gold plasmonic electrodes

Authors :
Marco Riccardi
Christian Santschi
Olivier J.F. Martin
Source :
Microelectronic Engineering. 263:111856
Publication Year :
2022
Publisher :
Elsevier BV, 2022.

Abstract

Nanofabrication is key to many technological advances, especially the challenge of merging nanophotonics with electronics. Here, we investigate the fabrication process of plasmonic interdigitated gold electrodes having a very high aspect ratio (i.e. long and thin geometries) and a large surface area. Stringent stability issues that arise when these structures are fabricated using inorganic adhesion layers, such as titanium or chromium, on silica substrates are highlighted. We ascribe these problems to thermodynamical non-equilibrium states of freshly deposited gold and, in particular, discuss the role of surface energy in determining the structural properties of high aspect ratio gold nanostructures. We then show that the use of organic silane self-assembled monolayers improves the long term stability of these structures and, finally, characterize the fabricated electrodes. This technology can unleash the potential of hybrid optoelectronic circuits where current and light are manipulated with the same component.

Details

ISSN :
01679317
Volume :
263
Database :
OpenAIRE
Journal :
Microelectronic Engineering
Accession number :
edsair.doi.dedup.....79159fdcd89b0f2ee961fc960fbedf43