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High-κ perovskite membranes as insulators for two-dimensional transistors

Authors :
Jing-Kai Huang
Yi Wan
Junjie Shi
Ji Zhang
Zeheng Wang
Wenxuan Wang
Ni Yang
Yang Liu
Chun-Ho Lin
Xinwei Guan
Long Hu
Zi-Liang Yang
Bo-Chao Huang
Ya-Ping Chiu
Jack Yang
Vincent Tung
Danyang Wang
Kourosh Kalantar-Zadeh
Tom Wu
Xiaotao Zu
Liang Qiao
Lain-Jong Li
Sean Li
Source :
Nature. 605:262-267
Publication Year :
2022
Publisher :
Springer Science and Business Media LLC, 2022.

Abstract

The scaling of silicon metal-oxide-semiconductor field-effect transistors has followed Moore's law for decades, but the physical thinning of silicon at sub-ten-nanometre technology nodes introduces issues such as leakage currents

Subjects

Subjects :
Multidisciplinary

Details

ISSN :
14764687 and 00280836
Volume :
605
Database :
OpenAIRE
Journal :
Nature
Accession number :
edsair.doi.dedup.....781fb589cc54f9d5536ecd7e1d3b3b3c
Full Text :
https://doi.org/10.1038/s41586-022-04588-2