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High-κ perovskite membranes as insulators for two-dimensional transistors
- Source :
- Nature. 605:262-267
- Publication Year :
- 2022
- Publisher :
- Springer Science and Business Media LLC, 2022.
-
Abstract
- The scaling of silicon metal-oxide-semiconductor field-effect transistors has followed Moore's law for decades, but the physical thinning of silicon at sub-ten-nanometre technology nodes introduces issues such as leakage currents
- Subjects :
- Multidisciplinary
Subjects
Details
- ISSN :
- 14764687 and 00280836
- Volume :
- 605
- Database :
- OpenAIRE
- Journal :
- Nature
- Accession number :
- edsair.doi.dedup.....781fb589cc54f9d5536ecd7e1d3b3b3c
- Full Text :
- https://doi.org/10.1038/s41586-022-04588-2