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Mechanical Characterization of PDMS Films for the Optimization of Polymer Based Flexible Capacitive Pressure Microsensors
- Source :
- Journal of Sensors, Vol 2017 (2017)
- Publication Year :
- 2017
- Publisher :
- Hindawi, 2017.
-
Abstract
- This paper reports on the optimization of flexible PDMS-based normal pressure capacitive microsensors dedicated to wearable applications. The operating principle and the fabrication process of such microsensors are presented. Then, the deformations under local pressure of PDMS thin films of thicknesses ranging from 100 μm to 10 mm are studied by means of numerical simulations in order to foresee the sensitivity of the considered microsensors. The study points out that, for a given PDMS type, the sensor form ratio plays a major role in its sensitivity. Indeed, for a given PDMS film, the expected capacitance change under a 10 N load applied on a 1.7 mm radius electrode varies from a few percent to almost 40% according to the initial PDMS film thickness. These observations are validated by experimental characterizations carried out on PDMS film samples of various thicknesses (10 μm to 10 mm) and on actual microsensors. Further computations enable generalized sensor design rules to be highlighted. Considering practical limitations in the fabrication and in the implementation of the actual microsensors, design rules based on computed form ratio optimization lead to the elaboration of flexible pressure microsensors exhibiting a sensitivity which reaches up to10%/N.
- Subjects :
- Fabrication
Materials science
Article Subject
Capacitive sensing
Nanotechnology
02 engineering and technology
01 natural sciences
Capacitance
lcsh:Technology (General)
Sensitivity (control systems)
Electrical and Electronic Engineering
Thin film
Instrumentation
chemistry.chemical_classification
business.industry
010401 analytical chemistry
Polymer
021001 nanoscience & nanotechnology
0104 chemical sciences
Characterization (materials science)
chemistry
Control and Systems Engineering
Electrode
lcsh:T1-995
Optoelectronics
0210 nano-technology
business
Subjects
Details
- Language :
- English
- ISSN :
- 1687725X
- Database :
- OpenAIRE
- Journal :
- Journal of Sensors
- Accession number :
- edsair.doi.dedup.....77d0fad80c31f69c2cc375d96c455657
- Full Text :
- https://doi.org/10.1155/2017/8235729