Pushing the Limits of Broadband and High Frequency Metamaterial Silicon Antireflection Coatings

Broadband refractive optics realized from high-index materials provide compelling design solutions for the next generation of observatories for the cosmic microwave background and for sub-millimeter astronomy. In this paper, work is presented which extends the state of the art in silicon lenses with metamaterial antireflection coatings toward larger-bandwidth and higher-frequency operation. Examples presented include octave bandwidth coatings with less than $$0.5\%$$ reflection, a prototype 4:1 bandwidth coating, and a coating optimized for 1.4 THz. For these coatings, the detailed design, fabrication and testing processes are described as well as the inherent performance trade-offs.