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General three-dimensional image simulation and surface reconstruction in scanning probe microscopy using a dexel representation
- Source :
- Ultramicroscopy. 108:29-42
- Publication Year :
- 2007
- Publisher :
- Elsevier BV, 2007.
-
Abstract
- The ability to image complex general three-dimensional (3D) structures, including reentrant surfaces and undercut features using scanning probe microscopy, is becoming increasing important in many small length-scale applications. This paper presents a dexel data representation and its algorithm implementation for scanning probe microscope (SPM) image simulation (morphological dilation) and surface reconstruction (erosion) on such general 3D structures. Validation using simulations, some of which are modeled upon actual atomic force microscope data, demonstrates that the dexel representation can efficiently simulate SPM imaging and reconstruct the sample surface from measured images, including those with reentrant surfaces and undercut features.
- Subjects :
- Materials science
business.industry
Mathematical morphology
External Data Representation
Atomic and Molecular Physics, and Optics
Dexel
Electronic, Optical and Magnetic Materials
Scanning probe microscopy
Reentrancy
Optics
Dilation (morphology)
Undercut
business
Instrumentation
Surface reconstruction
Subjects
Details
- ISSN :
- 03043991
- Volume :
- 108
- Database :
- OpenAIRE
- Journal :
- Ultramicroscopy
- Accession number :
- edsair.doi.dedup.....6e79edcc1c5b19fa3c348e6516f4f4f1