An Analytical Method for Gas Flow Measurement Using Conservative Chemical Elements

Mass flow meters (MFMs) are widely used to secure reliable flow rates based on the mass value of the gas being measured. However, chemical reactions produce various kinds of gases, and their composition also changes in real time. Thus, there may be a large deviation in the gas flow if the gases’ composition and its mixing ratio are not known. In this study, we derived a gas flow rate measurement method using a chemically stable chemical specie and verified the precision of the proposed method through comparative analysis with an MFM. The flow rate by this method showed reliable results in both single and mixed gases. Notably, the results were within ±2.74% of the injected flowrate values in the gas mixtures. This method is expected to be able to fundamentally overcome the limitations of the mechanical flowmeter because it is not affected by changes in gas composition or mixing ratio during the reaction.