In Situ Ellipsometry Study of the Early Stage of ZnO Atomic Layer Deposition on In 0.53 Ga 0.47 As

MLA

Jean-Luc Deschanvres, et al. In Situ Ellipsometry Study of the Early Stage of ZnO Atomic Layer Deposition on In 0.53 Ga 0.47 As. Jan. 2020. EBSCOhost, https://doi.org/10.1002/pssa.201900831⟩.

APA

Jean-Luc Deschanvres, Evgeniy V. Skopin, & Hubert Renevier. (2020). In Situ Ellipsometry Study of the Early Stage of ZnO Atomic Layer Deposition on In 0.53 Ga 0.47 As. https://doi.org/10.1002/pssa.201900831⟩

Chicago

Jean-Luc Deschanvres, Evgeniy V. Skopin, and Hubert Renevier. 2020. “In Situ Ellipsometry Study of the Early Stage of ZnO Atomic Layer Deposition on In 0.53 Ga 0.47 As,” January. doi:10.1002/pssa.201900831⟩.