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Electrical current at micro-/macro-scale of undoped an nitrogen-doped MWPECVD diamond films
- Source :
- Applied surface science 426 (2017): 456–465. doi:10.1016/j.apsusc.2017.07.132, info:cnr-pdr/source/autori:Cicala, G.; Velardi, L.; Senesi, G. S.; Picca, R. A.; Cioffi, N./titolo:Electrical current at micro-%2Fmacro-scale of undoped an nitrogen-doped MWPECVD diamond films/doi:10.1016%2Fj.apsusc.2017.07.132/rivista:Applied surface science/anno:2017/pagina_da:456/pagina_a:465/intervallo_pagine:456–465/volume:426
- Publication Year :
- 2017
- Publisher :
- North-Holland, Amsterdam , Paesi Bassi, 2017.
-
Abstract
- Chemical, structural, morphological and micro-/macro-electrical properties of undoped and nitrogen-(N-)doped diamond films are determined by X-ray photoelectron spectroscopy, Raman and photoluminescence spectroscopies, field emission scanning electron microscopy, atomic force microscopy, scanning capacitance microscopy (SCM) and two points technique for I-V characteristics, respectively. The characterization results are very useful to examine and understand the relationship among these properties. The effect of the nitrogen incorporation in diamond films is investigated through the evolution of the chemical, structural, morphological and topographical features and of the electrical behavior. The distribution of the electrical current is first assessed at millimeter scale on the surface of diamond films and then at micrometer scale on small regions in order to establish the sites where the carriers preferentially move. Specifically, the SCM images indicate a non-uniform distribution of carriers on the morphological structures mainly located along the grain boundaries. A good agreement is found by comparing the electrical currents at the micro- and macro-scale. This work aims to highlight phenomena such as photo- and thermionic emission from N-doped diamond useful for microelectronic engineering. (C) 2017 Elsevier B.V. All rights reserved.
- Subjects :
- Materials science
Material properties of diamond
General Physics and Astronomy
Thermionic emission
Nanotechnology
02 engineering and technology
Scanning capacitance microscopy
engineering.material
01 natural sciences
X-ray photoelectron spectroscopy
0103 physical sciences
Microscopy
Diamond film
010302 applied physics
business.industry
Electrical current at micro-/macro-scale
Diamond
Surfaces and Interfaces
General Chemistry
Nitrogen doping
021001 nanoscience & nanotechnology
Condensed Matter Physics
Surfaces, Coatings and Films
Field electron emission
Grains
Grain boundaries
engineering
Optoelectronics
Grain boundary
0210 nano-technology
business
Subjects
Details
- Language :
- English
- Database :
- OpenAIRE
- Journal :
- Applied surface science 426 (2017): 456–465. doi:10.1016/j.apsusc.2017.07.132, info:cnr-pdr/source/autori:Cicala, G.; Velardi, L.; Senesi, G. S.; Picca, R. A.; Cioffi, N./titolo:Electrical current at micro-%2Fmacro-scale of undoped an nitrogen-doped MWPECVD diamond films/doi:10.1016%2Fj.apsusc.2017.07.132/rivista:Applied surface science/anno:2017/pagina_da:456/pagina_a:465/intervallo_pagine:456–465/volume:426
- Accession number :
- edsair.doi.dedup.....6753e64f1cf6f6ea81d962777eb776ca