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Chip-less wireless electronic skins by remote epitaxial freestanding compound semiconductors

Authors :
Yeongin Kim
Jun Min Suh
Jiho Shin
Yunpeng Liu
Hanwool Yeon
Kuan Qiao
Hyun S. Kum
Chansoo Kim
Han Eol Lee
Chanyeol Choi
Hyunseok Kim
Doyoon Lee
Jaeyong Lee
Ji-Hoon Kang
Bo-In Park
Sungsu Kang
Jihoon Kim
Sungkyu Kim
Joshua A. Perozek
Kejia Wang
Yongmo Park
Kumar Kishen
Lingping Kong
Tomás Palacios
Jungwon Park
Min-Chul Park
Hyung-jun Kim
Yun Seog Lee
Kyusang Lee
Sang-Hoon Bae
Wei Kong
Jiyeon Han
Jeehwan Kim
Source :
Science (New York, N.Y.). 377(6608)
Publication Year :
2022

Abstract

Recent advances in flexible and stretchable electronics have led to a surge of electronic skin (e-skin)–based health monitoring platforms. Conventional wireless e-skins rely on rigid integrated circuit chips that compromise the overall flexibility and consume considerable power. Chip-less wireless e-skins based on inductor-capacitor resonators are limited to mechanical sensors with low sensitivities. We report a chip-less wireless e-skin based on surface acoustic wave sensors made of freestanding ultrathin single-crystalline piezoelectric gallium nitride membranes. Surface acoustic wave–based e-skin offers highly sensitive, low-power, and long-term sensing of strain, ultraviolet light, and ion concentrations in sweat. We demonstrate weeklong monitoring of pulse. These results present routes to inexpensive and versatile low-power, high-sensitivity platforms for wireless health monitoring devices.

Details

ISSN :
10959203
Volume :
377
Issue :
6608
Database :
OpenAIRE
Journal :
Science (New York, N.Y.)
Accession number :
edsair.doi.dedup.....6097b8e0b437c48b7b6c60634b0ccd9e