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Temperature Sensitivity of Surface Phononic Crystals modes (SPnC) based on Ni Pillars array deposited on LiNBO3

Authors :
Olivier Bou-Matar
Abdelkrim Talbi
Aurelien Mazzamurro
Philippe Pernod
Cecile Ghouila Houri
Ghizlaine Boussatour
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 (IEMN)
Centrale Lille-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF)-JUNIA (JUNIA)
Université catholique de Lille (UCL)-Université catholique de Lille (UCL)
Acoustique Impulsionnelle & Magnéto-Acoustique Non linéaire - Fluides, Interfaces Liquides & Micro-Systèmes - IEMN (AIMAN-FILMS - IEMN)
Université catholique de Lille (UCL)-Université catholique de Lille (UCL)-Centrale Lille-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF)-JUNIA (JUNIA)
This work was funded by the regional platform CONTRAERO in the framework of the CPER ELSAT 2020 Project. The authors also thank RENATECH, the French national nanofabrication network, and FEDER
Renatech Network
European Project
Source :
2021 Symposium on Design, Test, Integration and Packaging of MEMS and MOEMS, DTIP 2021, 2021 Symposium on Design, Test, Integration and Packaging of MEMS and MOEMS, DTIP 2021, Aug 2021, Paris, France. pp.1-3, ⟨10.1109/DTIP54218.2021.9568671⟩
Publication Year :
2021
Publisher :
HAL CCSD, 2021.

Abstract

International audience; This work focuses on the theoretical and experimental investigation of acoustic waves sensors based on 2D Surface Phononic Crystals (PnC). We investigated the temperature coefficient of frequency (TCF) for surface localized modes in 2D PnCs composed of Ni pillars deposited on Y-cut LiNBO3 substrate. We demonstrated both theoretically and experimentally that near the first limit of the Brillouin zone, the surface acoustic wave's temperature sensitivity depends considerably on pillars stiffness temperature constants, theirs resonance modes and lattice symmetry of the PnC.

Details

Language :
English
Database :
OpenAIRE
Journal :
2021 Symposium on Design, Test, Integration and Packaging of MEMS and MOEMS, DTIP 2021, 2021 Symposium on Design, Test, Integration and Packaging of MEMS and MOEMS, DTIP 2021, Aug 2021, Paris, France. pp.1-3, ⟨10.1109/DTIP54218.2021.9568671⟩
Accession number :
edsair.doi.dedup.....5e7fc9b2cb357fe238a569e67bae0bb1