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Temperature Sensitivity of Surface Phononic Crystals modes (SPnC) based on Ni Pillars array deposited on LiNBO3
- Source :
- 2021 Symposium on Design, Test, Integration and Packaging of MEMS and MOEMS, DTIP 2021, 2021 Symposium on Design, Test, Integration and Packaging of MEMS and MOEMS, DTIP 2021, Aug 2021, Paris, France. pp.1-3, ⟨10.1109/DTIP54218.2021.9568671⟩
- Publication Year :
- 2021
- Publisher :
- HAL CCSD, 2021.
-
Abstract
- International audience; This work focuses on the theoretical and experimental investigation of acoustic waves sensors based on 2D Surface Phononic Crystals (PnC). We investigated the temperature coefficient of frequency (TCF) for surface localized modes in 2D PnCs composed of Ni pillars deposited on Y-cut LiNBO3 substrate. We demonstrated both theoretically and experimentally that near the first limit of the Brillouin zone, the surface acoustic wave's temperature sensitivity depends considerably on pillars stiffness temperature constants, theirs resonance modes and lattice symmetry of the PnC.
- Subjects :
- Work (thermodynamics)
Materials science
Acoustic wave
Condensed matter physics
SAW
Lithium niobate
Surface acoustic wave
Resonance
Bandgap
Substrate (electronics)
TCF
Brillouin zone
chemistry.chemical_compound
[SPI]Engineering Sciences [physics]
chemistry
Phononic Crystals
Local resonance
Surface Phononic crystal
Temperature coefficient
Subjects
Details
- Language :
- English
- Database :
- OpenAIRE
- Journal :
- 2021 Symposium on Design, Test, Integration and Packaging of MEMS and MOEMS, DTIP 2021, 2021 Symposium on Design, Test, Integration and Packaging of MEMS and MOEMS, DTIP 2021, Aug 2021, Paris, France. pp.1-3, ⟨10.1109/DTIP54218.2021.9568671⟩
- Accession number :
- edsair.doi.dedup.....5e7fc9b2cb357fe238a569e67bae0bb1