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Hot carrier degradation in nanowire transistors: Physical mechanisms, width dependence and impact of Self-Heating

Authors :
S. Barraud
Emmanuel Vincent
A. Laurent
X. Garros
Gerard Ghibaudo
G. Reimbold
David Roy
G. Mariniello
STMicroelectronics [Crolles] (ST-CROLLES)
Commissariat à l'énergie atomique et aux énergies alternatives - Laboratoire d'Electronique et de Technologie de l'Information (CEA-LETI)
Direction de Recherche Technologique (CEA) (DRT (CEA))
Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Commissariat à l'énergie atomique et aux énergies alternatives (CEA)
Institut de Microélectronique, Electromagnétisme et Photonique - Laboratoire d'Hyperfréquences et Caractérisation (IMEP-LAHC )
Institut polytechnique de Grenoble - Grenoble Institute of Technology (Grenoble INP )-Université Savoie Mont Blanc (USMB [Université de Savoie] [Université de Chambéry])-Centre National de la Recherche Scientifique (CNRS)-Université Grenoble Alpes [2016-2019] (UGA [2016-2019])
Nano 2017
Source :
2016 VLSI-Technology Technical Digest, 2016 IEEE Symposium on VLSI Technology, 2016 IEEE Symposium on VLSI Technology, Jun 2016, Honolulu, United States. pp.39-40, ⟨10.1109/VLSIT.2016.7573374⟩
Publication Year :
2016
Publisher :
HAL CCSD, 2016.

Abstract

session 5: Device Reliability; International audience; We present an extensive study of Hot Carrier reliability in N-Ωfet nanowires. For the first time 3 HC degradation modes were clearly evidenced as in planar technology and accurately modeled. Moreover HC reliability was proved to be width-independent. Finally it is shown that, although SH is important in nanowires, it has almost no implication on its HC reliability because of the weak temperature dependence of the HC mechanisms.

Details

Language :
English
Database :
OpenAIRE
Journal :
2016 VLSI-Technology Technical Digest, 2016 IEEE Symposium on VLSI Technology, 2016 IEEE Symposium on VLSI Technology, Jun 2016, Honolulu, United States. pp.39-40, ⟨10.1109/VLSIT.2016.7573374⟩
Accession number :
edsair.doi.dedup.....5df27ded238ece8fa97e90611f34c3f2