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MEMS high-doses radiation sensor
- Source :
- Proceedings Transducers, Transducers, Transducers, Jun 2013, Barcelone, Spain. pp.T4A.005
- Publication Year :
- 2013
- Publisher :
- IEEE, 2013.
-
Abstract
- International audience; New MEMS sensor for detection of high doses (above 10 kGy) of radiation has been presented. The sensor is made of silicon and glass in a form of anodically bonded sandwich 9 × 16 × 2.6 mm3. The sensor contains chamber with small portion of high density polyethylene (HDPE) and thin silicon membrane. Irradiation releases gaseous hydrogen, which flows from the chamber to the membrane. For known radiation dose pressure of hydrogen destroys the membrane, what is optically noticed. The sensor show good detectability of doses of radiation up to 120 kGy.
- Subjects :
- Microelectromechanical systems
chemistry.chemical_classification
high dose radiation
Materials science
Hydrogen
Silicon
business.industry
chemistry.chemical_element
02 engineering and technology
Polymer
polyethylene degradation
Radiation
021001 nanoscience & nanotechnology
01 natural sciences
010309 optics
Membrane
chemistry
0103 physical sciences
Optoelectronics
MEMS radiation sensor
High-density polyethylene
Irradiation
[SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics
0210 nano-technology
business
Subjects
Details
- Database :
- OpenAIRE
- Journal :
- 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)
- Accession number :
- edsair.doi.dedup.....5d42725ee333e28e2832076b5d89c1c5