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Multislice imaging of integrated circuits by precession X-ray ptychography
- Source :
- Acta Crystallographica Section A Foundations and Advances. 74:66-70
- Publication Year :
- 2018
- Publisher :
- International Union of Crystallography (IUCr), 2018.
-
Abstract
- A method for nondestructively visualizing multisection nanostructures of integrated circuits by X-ray ptychography with a multislice approach is proposed. In this study, tilt-series ptychographic diffraction data sets of a two-layered circuit with a ∼1.4 µm gap at nine incident angles are collected in a wideQrange and then artifact-reduced phase images of each layer are successfully reconstructed at ∼10 nm resolution. The present method has great potential for the three-dimensional observation of flat specimens with thickness on the order of 100 µm, such as three-dimensional stacked integrated circuits based on through-silicon vias, without laborious sample preparation.
- Subjects :
- Diffraction
Materials science
02 engineering and technology
Integrated circuit
01 natural sciences
Biochemistry
Phase image
law.invention
010309 optics
Inorganic Chemistry
Optics
Structural Biology
law
0103 physical sciences
General Materials Science
Multislice
Physical and Theoretical Chemistry
business.industry
Resolution (electron density)
X-ray
021001 nanoscience & nanotechnology
Condensed Matter Physics
Ptychography
Precession
0210 nano-technology
business
Subjects
Details
- ISSN :
- 20532733
- Volume :
- 74
- Database :
- OpenAIRE
- Journal :
- Acta Crystallographica Section A Foundations and Advances
- Accession number :
- edsair.doi.dedup.....5c24e347bad4dcecb091099e1f1a6bc7
- Full Text :
- https://doi.org/10.1107/s205327331701525x