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Multislice imaging of integrated circuits by precession X-ray ptychography

Authors :
Kei Shimomura
Yukio Takahashi
Makoto Hirose
Source :
Acta Crystallographica Section A Foundations and Advances. 74:66-70
Publication Year :
2018
Publisher :
International Union of Crystallography (IUCr), 2018.

Abstract

A method for nondestructively visualizing multisection nanostructures of integrated circuits by X-ray ptychography with a multislice approach is proposed. In this study, tilt-series ptychographic diffraction data sets of a two-layered circuit with a ∼1.4 µm gap at nine incident angles are collected in a wideQrange and then artifact-reduced phase images of each layer are successfully reconstructed at ∼10 nm resolution. The present method has great potential for the three-dimensional observation of flat specimens with thickness on the order of 100 µm, such as three-dimensional stacked integrated circuits based on through-silicon vias, without laborious sample preparation.

Details

ISSN :
20532733
Volume :
74
Database :
OpenAIRE
Journal :
Acta Crystallographica Section A Foundations and Advances
Accession number :
edsair.doi.dedup.....5c24e347bad4dcecb091099e1f1a6bc7
Full Text :
https://doi.org/10.1107/s205327331701525x