Electron Beam Parameters

Authors :: David B. Williams
David C. Joy
Joseph I. Goldstein
Charles E. Fiori
Dale E. Newbury
Klaus-Ruediger Peters
Alton D. Romig
John T. Armstrong
Eric Lifshin
Charles E. Lyman
Patrick Echlin
Source :: Scanning Electron Microscopy, X-Ray Microanalysis, and Analytical Electron Microscopy ISBN: 9780306435911
Publication Year :: 1990
Publisher :: Springer US, 1990.
Abstract: This laboratory demonstrates: (1) election gun saturation and alignment; (2) the measurement of beam current, beam size, and beam convergence; (3) the concept of electron gun brightness; and (4) the effects of these parameters on depth-of-field and resolution. More details and references can be found in SEMXM, Chapter 2.

Subjects :: Beam diameter
Materials science
Ion beam deposition
Optics
Electron spectrometer
business.industry
Electron beam welding
Laser beam quality
Electron beam-induced deposition
business
Beam parameter product
Electron gun

ISBN :: 978-0-306-43591-1
ISBNs :: 9780306435911
Database :: OpenAIRE
Journal :: Scanning Electron Microscopy, X-Ray Microanalysis, and Analytical Electron Microscopy ISBN: 9780306435911
Accession number :: edsair.doi.dedup.....5a4cf050d9427f68f31f0f0f33955c8a
Full Text :: https://doi.org/10.1007/978-1-4613-0635-1_31