Journey of a molecule from the solid to the gas phase and vice versa: direct estimation of vapor pressure of alkaline-earth metalorganic precursors for atmospheric pressure vapor phase deposition of fluoride films

An easy approach is presented to determine vapor pressures of complexes and thus to evaluate “a priori” their suitability as precursors for AP-MOCVD or spatial ALD. Fluorinated Mg and Ca compounds have been applied to the AP-MOCVD of MF2 films.