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Structural and magnetic properties of Mn+ implanted silicon crystals studied using X-ray absorption spectroscopy techniques
- Source :
- Radiation physics and chemistry 80, 1119 (2011). doi:10.1016/j.radphyschem.2011.02.013
- Publication Year :
- 2011
- Publisher :
- Elsevier BV, 2011.
-
Abstract
- The implantation of Mn ions into two Si substrates with different doping (P or B), resistivity and oxygen content was performed at low and high substrate temperatures. Different post-implantation p ...
- Subjects :
- 010302 applied physics
X-ray absorption spectroscopy
Radiation
Materials science
Silicon
Extended X-ray absorption fine structure
Doping
Analytical chemistry
chemistry.chemical_element
02 engineering and technology
Substrate (electronics)
021001 nanoscience & nanotechnology
01 natural sciences
Ion
chemistry
Electrical resistivity and conductivity
ddc:540
0103 physical sciences
0210 nano-technology
Oxygen content
Subjects
Details
- ISSN :
- 0969806X
- Volume :
- 80
- Database :
- OpenAIRE
- Journal :
- Radiation Physics and Chemistry
- Accession number :
- edsair.doi.dedup.....57b316959b343ffde1d12e34f2d8d136
- Full Text :
- https://doi.org/10.1016/j.radphyschem.2011.02.013