Bending Behavior of Flexible Crystalline Silicon Nanomembrane Photonic Crystal Microcavities

Authors :: Xiaochuan Xu
Swapnajit Chakravarty
Ray T. Chen
Harish Subbaraman
Source :: Scopus-Elsevier
Publication Year :: 2015
Publisher :: OSA, 2015.
Abstract: We demonstrated a flexible crystalline silicon nanomembrane photonic crystal microcavity with a quality factor of 22,000 and experimentally studied its bending behavior.

Subjects :: Materials science
Silicon
business.industry
Scanning electron microscope
Finite-difference time-domain method
Physics::Optics
chemistry.chemical_element
Bending
chemistry
Optoelectronics
Crystalline silicon
Photonics
business
Photonic crystal

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