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Characterization of TiN Protective Coatings
- Source :
- Solid State Phenomena
- Publication Year :
- 1998
- Publisher :
- Trans Tech Publications, Ltd., 1998.
-
Abstract
- This work reports on an analysis of titanium nitride layers deposited by the PVD method and changes induced in the deposit during interaction with a laser beam. Layers up to 850 nm thick were deposited by Ti target sputtering into an atmosphere of reactive gas. Layer phase composition, lattice parameter, interplanar spacing and preferential orientation of crystallites in the layer were investigated by X-ray diffraction analysis. The mean grain size and micro strain in the deposit were defined from peak line broadening in the CuK alpha spectrum. Crystallite size was defined additionally by scanning tunnelling microscopy (STM), before and after laser beam treatment.
- Subjects :
- Materials science
Metallurgy
STM
chemistry.chemical_element
02 engineering and technology
titanium nitride protective coatings
010402 general chemistry
021001 nanoscience & nanotechnology
Condensed Matter Physics
01 natural sciences
Atomic and Molecular Physics, and Optics
0104 chemical sciences
Characterization (materials science)
X-ray
laser interaction
chemistry
characterization
General Materials Science
0210 nano-technology
Tin
Subjects
Details
- ISSN :
- 16629779
- Database :
- OpenAIRE
- Journal :
- Solid State Phenomena
- Accession number :
- edsair.doi.dedup.....54f74474577324d7b1f660551777afb9