Applications of non-periodic multilayer optics for high-resolution x-ray microscopes below 30 keV

Multilayer mirrors with enhanced bandwidth were developed with special performances for dense plasma diagnostics and mainly for high spatial resolution x-ray imaging. The multilayer coatings are designed to provide broadband x-ray reflectance at low grazing incidence angles. They are deposited onto toroidal mirror substrates. Our research is directed at the development of non-periodic (depth graded) W∕Si multilayer specifically designed for use in the 1 to 30 keV photon energy band. First, we present a study for a 5 to 22 keV x-ray spectral window at 0.45° grazing angle. The goal is to obtain a high and constant reflectivity. Second, we have modeled a broadband mirror coating for harder x-rays in the range from 10 to 30 keV, with a non-periodic structure containing 300 W∕SiC layers with periods in the range from 0.8 to 4 nm, designed for 0.35° grazing incidence angle.