Design and Experiment of Dual-Mass MEMS Gyroscope Sense Closed System Based on Bipole Compensation Method

This paper presents a sense mode closed-loop method for dual-mass micro-electro-mechanical system (MEMS) gyroscope based on the bipole temperature compensation method. A pair of conjugate poles are investigated as the bottle neck of the sense closed-loop system of MEMS gyroscope, and the bipole temperature compensation proportional controller (BTCPC) is employed to realize the closed-loop: a pair of additional conjugate zeros are utilized to generate bipoles with poles. Since poles changes with temperature, thermal resistance is utilized in BTCPC to make zeros variable with temperatures. The BTCPC is designed very carefully to make the system have enough bandwidth and better performance. The overall gyroscope model is established and simulated either in the time domain or the frequency domain, and the results verify that the sense closed-loop works rapidly and steadily. The system is realized on PCBs and is tested on the turntable in temperature oven. The experimental results show that the bias stability, angular random walking, bias temperature coefficient, and the bandwidth values of sense open-loop and closed-loop are 2.168 °/h, 0.155 °/%/h, 9.534 °/h/°C, 13 Hz, and 2.168 °/h, 0.140 °/%/h (five tests average value), 5.991 °/h°C, 61 Hz, respectively.