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Sub-Deg-per-Hour Edge-Anchored Bulk Acoustic Wave Micromachined Disk Gyroscope
- Publication Year :
- 2021
- Publisher :
- Institute of Electrical and Electronics Engineers (IEEE), 2021.
-
Abstract
- This paper reports on the experimental characterization of a vacuum packaged bulk acoustic wave disk gyroscope with T-shape anchors fabricated on a (100) single-crystal silicon substrate. Improvements in key device performance parameters are achieved by implementing mode matching using electrostatic frequency tuning to decrease the frequency split between two near-degenerate bulk acoustic modes from 4 Hz to 0.4 Hz. Gyroscopic operation is demonstrated by driving one of the secondary degenerate elliptical modes while sensing the response in the other elliptical mode, both demonstrating quality factors exceeding 1 million at an operating frequency of ~976 kHz. As a result, the mechanical sensitivity of the gyroscope is improved by a factor of 7.76 times for near mode-matched operation relative to the case with no tuning of the frequency spacing between the modes. Additionally, the angle random walk and bias instability were improved from 0.042 °/√h to 0.037 °/√h and 1.65 °/h to 0.95 °/h respectively, benchmarking favorably with respect to the state-of-the-art of BAW disk gyroscopes. [2021-0151]
- Subjects :
- Materials science
Silicon
business.industry
Mechanical Engineering
chemistry.chemical_element
Gyroscope
gyroscopes
Substrate (electronics)
Edge (geometry)
Random walk
Instability
law.invention
mode matching
MEMS
Optics
Quality (physics)
chemistry
law
bulk acoustic wave mode
Electrical and Electronic Engineering
business
Sensitivity (electronics)
Subjects
Details
- Database :
- OpenAIRE
- Accession number :
- edsair.doi.dedup.....4e6e2c6efdf73bc08f308557ef96db2b
- Full Text :
- https://doi.org/10.17863/cam.74513