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Characterization of Silicon-On-Diamond chip with ionizing radiation
- Source :
- Journal of Instrumentation. 9:C04019-C04019
- Publication Year :
- 2014
- Publisher :
- IOP Publishing, 2014.
-
Abstract
- In this work we report on the characterization with ionizing radiation sources of a CMOS active pixel radiation sensor (RAPS03) thinned down to 40um and bonded to a slice of diamond to form a rugged Silicon-On-Diamond structure. The bonding process is based on an innovative laser technique which scans the silicon-diamond interface with a 20 ps pulsed 355 nm laser beam. The goal of the work is to demonstrate that the bonding procedure does not damage the CMOS devices, paving the way for a possible alternative to bump bonding procedures between diamond substrates and readout chips. To this purpose, the Silicon-On-Diamond device and a standard (e.g. un-thinned) RAPS03 sensor have been tested in parallel with and without ionizing radiation sources (photons, electrons) to compare their characteristics and to study their differences. The Silicon-On-Diamond device has shown to be fully functional and no differences have been found between the responses of the two sensors, within the statistical variations due to the CMOS fabrication process.
- Subjects :
- Fabrication
Materials science
Silicon
business.industry
Diamond
chemistry.chemical_element
Electronic detector readout concepts
engineering.material
Laser
Chip
Particle tracking detectors
Radiation-hard detectors
Diamond Detectors
law.invention
CMOS
chemistry
law
engineering
Optoelectronics
Wafer
Laser bonding
business
Instrumentation
Mathematical Physics
Subjects
Details
- ISSN :
- 17480221
- Volume :
- 9
- Database :
- OpenAIRE
- Journal :
- Journal of Instrumentation
- Accession number :
- edsair.doi.dedup.....4d6a555c04ed84c40297af3fb8b23354
- Full Text :
- https://doi.org/10.1088/1748-0221/9/04/c04019