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Integrated Silicon Nitride Horizontal Long Period Grating for Refractometric Gas Sensing applications
- Source :
- I2MTC, 2020 IEEE International Instrumentation and Measurement Technology Conference (I2MTC), 2020 IEEE International Instrumentation and Measurement Technology Conference (I2MTC), May 2020, Dubrovnik, Croatia. pp.1-6, ⟨10.1109/I2MTC43012.2020.9129170⟩
- Publication Year :
- 2020
- Publisher :
- IEEE, 2020.
-
Abstract
- International audience; We designed an integrated long period grating based on the horizontal periodic tapering of a silicon nitride channel waveguide. The structure is studied for gas sensing applications, using Styrene AcryloNitrile as sensitive layer. Simulation results from the proposed architecture show a high sensitivity beyond 1700 nm/RIU using a wavelength interrogation method centered at 1550 nm for a 20pm large and 300pm long structure.
- Subjects :
- business.industry
Sensing applications
Tapering
Grating
Waveguide (optics)
chemistry.chemical_compound
Silicon nitride
chemistry
[SPI.OPTI]Engineering Sciences [physics]/Optics / Photonic
Medicine
Optoelectronics
[SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics
business
Layer (electronics)
Sensitivity (electronics)
Communication channel
Subjects
Details
- Database :
- OpenAIRE
- Journal :
- 2020 IEEE International Instrumentation and Measurement Technology Conference (I2MTC)
- Accession number :
- edsair.doi.dedup.....4719186c35f14dffe460e9ebaa4892f8
- Full Text :
- https://doi.org/10.1109/i2mtc43012.2020.9129170