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Nanoscale Surface Modifications by Magnetic Field-Assisted Finishing
- Source :
- Journal of Manufacturing Science and Engineering. 135
- Publication Year :
- 2013
- Publisher :
- ASME International, 2013.
-
Abstract
- A magnetic field-assisted finishing (MAF) process has been developed to reduce the sidewall surface roughness of the 5–20 μm wide curvilinear pores of microelectromechanical systems micropore X-ray optics to
- Subjects :
- Microelectromechanical systems
Materials science
Silicon
business.industry
Scanning electron microscope
Mechanical Engineering
Polishing
chemistry.chemical_element
Microporous material
Industrial and Manufacturing Engineering
Computer Science Applications
Field electron emission
Optics
chemistry
Control and Systems Engineering
Surface roughness
Optoelectronics
business
Nanoscopic scale
Subjects
Details
- ISSN :
- 15288935 and 10871357
- Volume :
- 135
- Database :
- OpenAIRE
- Journal :
- Journal of Manufacturing Science and Engineering
- Accession number :
- edsair.doi.dedup.....4619b78493e88ace2c45dc82a3a6a87b
- Full Text :
- https://doi.org/10.1115/1.4025190