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Field-induced nanolithography for high-throughput pattern transfer

Authors :
Tommi K. Hakala
Veikko Linko
J. Jussi Toppari
Anton Kuzyk
Antti-Pekka Eskelinen
Päivi Törmä
Source :
Small (Weinheim an der Bergstrasse, Germany). 5(23)
Publication Year :
2009

Details

ISSN :
16136829
Volume :
5
Issue :
23
Database :
OpenAIRE
Journal :
Small (Weinheim an der Bergstrasse, Germany)
Accession number :
edsair.doi.dedup.....43535010e3ff4f08620907a181fe514d