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Electrostatic Comb-Drived Actuator for MEMS Relay/Switch

Authors :
Jiahao Zhao
Yongfeng Gao
Source :
Micro/Nano Technologies ISBN: 9789811059445, Toxinology ISBN: 9789400767256
Publication Year :
2018
Publisher :
Springer Singapore, 2018.

Subjects

Subjects :
Microelectromechanical systems
Materials science
business.industry
Solid-state relay
Electrical engineering
Control engineering
02 engineering and technology
021001 nanoscience & nanotechnology
law.invention
020303 mechanical engineering & transports
0203 mechanical engineering
Relay
law
business
Actuator
0210 nano-technology

Details

ISBN :
978-981-10-5944-5
978-94-007-6725-6
ISBNs :
9789811059445 and 9789400767256
Database :
OpenAIRE
Journal :
Micro/Nano Technologies ISBN: 9789811059445, Toxinology ISBN: 9789400767256
Accession number :
edsair.doi.dedup.....432b856eb2d12b199ef5622e01a72b51

Tools

Authors Abstract Subjects Details