CHARACTERIZATION OF POLYCRYSTALLINE SILICON PARTICLES PRODUCED VIA CVD FROM MONOSILANE IN A FLUIDIZED BED REACTOR

Characterization of polycrystalline silicon particles produced in a fluidized bed reactor via CVD from monosilane was carried out. It was observed that part of the hydrogen from monosilane remained in the particles. Most of hydrogen was bonded to silicon and temperatures as high as 1300 K were required to dehydrogenate the silicon particles. Particles were contaminated with metal elements which were diffused from the reactor wall, suggesting that the material used in constructing the fluidized bed reactor wall also needed to be controlled to improve the purity of product.