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Flambage et vibrations non-linéaires d'une plaque stratifiée piézoélectrique. Application à un capteur de masse MEMS
- Source :
- Mécanique et Industries, Mécanique et Industries, Elsevier, 2009, 10 (3-4), pp.311-316. ⟨10.1051/meca/2009057⟩, CFM 2009-19ème Congrès Français de Mécanique, CFM 2009-19ème Congrès Français de Mécanique, Aug 2009, Marseille, France, Mécanique et Industries, 2009, 10 (3-4), pp.311-316. ⟨10.1051/meca/2009057⟩
- Publication Year :
- 2009
- Publisher :
- HAL CCSD, 2009.
-
Abstract
- Mots cles : Plaque stratifiee / non-linearites geometriques / flambage / vibrations / piezoelectrique Abstract - Buckling and non-linear vibrations of a piezoelectric stratified plate. Application to a MEMS mass sensor. This study proposes a model of a circular, non-symetrically laminated, piezoelectric plate, subjected to non-linear large amplitude vibrations. This model is built to simulate the behavior of a MEMS bio-sensor, designed to detect, automatically and autonomously, the presence of a given molecule in an aqueous solution. Because of both the laminated structure and the fabrication process, prestresses are observed, with different signs and intensities from one layer to another. This is responsible of a non-planar deformed geometry of the plate at rest. Moreover, experimental results show that a geometrically non-linear response is observed, with curved freqeuncy responses. A continuous non- linear model of the von-Karman type is used and discretized by an expansion of the solution onto the mode shape basis of the plate without prestresses. It's response is numerically computed by a continuation method, in order to predict the system's non-linear behavior.
- Subjects :
- Discretization
Piezoelectric sensor
Mechanical Engineering
Modal analysis
Mathematical analysis
Geometry
02 engineering and technology
[PHYS.MECA]Physics [physics]/Mechanics [physics]
[SPI.MECA]Engineering Sciences [physics]/Mechanics [physics.med-ph]
021001 nanoscience & nanotechnology
Curvature
Föppl–von Kármán equations
Piezoelectricity
Industrial and Manufacturing Engineering
Vibration
020303 mechanical engineering & transports
0203 mechanical engineering
Buckling
General Materials Science
0210 nano-technology
Mathematics
Subjects
Details
- Language :
- French
- ISSN :
- 12962139
- Database :
- OpenAIRE
- Journal :
- Mécanique et Industries, Mécanique et Industries, Elsevier, 2009, 10 (3-4), pp.311-316. ⟨10.1051/meca/2009057⟩, CFM 2009-19ème Congrès Français de Mécanique, CFM 2009-19ème Congrès Français de Mécanique, Aug 2009, Marseille, France, Mécanique et Industries, 2009, 10 (3-4), pp.311-316. ⟨10.1051/meca/2009057⟩
- Accession number :
- edsair.doi.dedup.....425daaf2e6ea531dc5efce971ce19e89