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XPS combined with MM-EPES technique for in situ study of ultra thin film deposition: Application to an Au/SiO 2 /Si structure
- Source :
- Applied Surface Science, Applied Surface Science, Elsevier, 2015, 357, pp.1268-1273. ⟨10.1016/j.apsusc.2015.09.154⟩, Applied Surface Science, 2015, 357, pp.1268-1273. ⟨10.1016/j.apsusc.2015.09.154⟩
- Publication Year :
- 2015
- Publisher :
- HAL CCSD, 2015.
-
Abstract
- An in situ method based on the combination between XPS and MM-EPES techniques is developed in order to study the growth mode and to determine the nanostructure surface of a deposited ultra thin film on solid substrate by determining both the thickness and the covering. In this way, XPS and MM-EPES modeling are done by adapting a simple approach of the surface organization. Then this method is used to study a gold film deposition on an oxidized silicon substrate. This study leads to determine accurately the surface organization and thus the growth mode. Moreover, the obtained results were validated by performing microscopic measurement by Atomic Force Microscopy (AFM) and Scanning Electron Microscopy (SEM). AFM and SEM results show a good agreement with those determined by the combination of XPS and MM-EPES techniques. Moreover, experiment shows that this method is able to determine surface parameters when the microscopy techniques do not give any information in the case of a small quantity of deposited Au.
- Subjects :
- Nanostructure
Materials science
Silicon
Scanning electron microscope
Analytical chemistry
General Physics and Astronomy
chemistry.chemical_element
Surfaces and Interfaces
General Chemistry
Substrate (electronics)
Condensed Matter Physics
Surfaces, Coatings and Films
chemistry
X-ray photoelectron spectroscopy
Microscopy
[PHYS.COND.CM-MS]Physics [physics]/Condensed Matter [cond-mat]/Materials Science [cond-mat.mtrl-sci]
Deposition (phase transition)
Thin film
[SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics
ComputingMilieux_MISCELLANEOUS
Subjects
Details
- Language :
- English
- ISSN :
- 01694332
- Database :
- OpenAIRE
- Journal :
- Applied Surface Science, Applied Surface Science, Elsevier, 2015, 357, pp.1268-1273. ⟨10.1016/j.apsusc.2015.09.154⟩, Applied Surface Science, 2015, 357, pp.1268-1273. ⟨10.1016/j.apsusc.2015.09.154⟩
- Accession number :
- edsair.doi.dedup.....4164ec153bbe2f377216b0e4bd29d8cd