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The influence of the deposition pressure on the composition and the mechanical properties of W–S–C coatings deposited by magnetron sputtering in semi-industrial conditions
- Source :
- Vacuum
- Publication Year :
- 2021
-
Abstract
- Self-lubricant W–S–C coatings with optimized composition possess a unique ability to provide a reduction of friction and wear in numerous operating conditions. In this study, W–S–C coatings are deposited by magnetron sputtering at different pressures, in semi-industrial conditions. The composition and tribo-mechanical properties are studied. The deposition pressure affected the carbon content of the coatings and, more importantly, the S/W ratio. Increasing the deposition pressure enhances the importance of the scattering behavior of the sputtered species. The tribological response was closely related to the S/W ratio, with better performance for higher S/W ratios. For industrialization of the W–S–C coatings, deposition at longer target-to-substrate distances is favorable.
- Subjects :
- 010302 applied physics
Materials science
Deposition pressure
Scattering
chemistry.chemical_element
02 engineering and technology
Tribology
Sputter deposition
021001 nanoscience & nanotechnology
Condensed Matter Physics
01 natural sciences
Surfaces, Coatings and Films
chemistry
0103 physical sciences
Composition (visual arts)
Composite material
0210 nano-technology
Instrumentation
Carbon
Deposition (chemistry)
Subjects
Details
- ISSN :
- 0042207X
- Database :
- OpenAIRE
- Journal :
- Vacuum
- Accession number :
- edsair.doi.dedup.....4040d16a91501491c552b27ce972cf99
- Full Text :
- https://doi.org/10.1016/j.vacuum.2020.109963