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The influence of the deposition pressure on the composition and the mechanical properties of W–S–C coatings deposited by magnetron sputtering in semi-industrial conditions

Authors :
Albano Cavaleiro
Todor Vuchkov
Talha Bin Yaqub
Source :
Vacuum
Publication Year :
2021

Abstract

Self-lubricant W–S–C coatings with optimized composition possess a unique ability to provide a reduction of friction and wear in numerous operating conditions. In this study, W–S–C coatings are deposited by magnetron sputtering at different pressures, in semi-industrial conditions. The composition and tribo-mechanical properties are studied. The deposition pressure affected the carbon content of the coatings and, more importantly, the S/W ratio. Increasing the deposition pressure enhances the importance of the scattering behavior of the sputtered species. The tribological response was closely related to the S/W ratio, with better performance for higher S/W ratios. For industrialization of the W–S–C coatings, deposition at longer target-to-substrate distances is favorable.

Details

ISSN :
0042207X
Database :
OpenAIRE
Journal :
Vacuum
Accession number :
edsair.doi.dedup.....4040d16a91501491c552b27ce972cf99
Full Text :
https://doi.org/10.1016/j.vacuum.2020.109963