Ordering and self-organized growth of Si in the Si/SiO2 superlattice system

We have observed self-organization in Si nanocrystals fabricated by high temperature annealing of nanometer-thick layers of amorphous Si confined between thin SiO 2 layers. Silicon nanoparticles larger than ∼8 nm spontaneously form brick-shaped crystallites oriented along the [1 1 1] direction while smaller nanocrystals adopt a more spherical geometry. The observed ordering and self-organization are important steps towards reproducible maskless Si nanofabrication and the consequent construction of Si/SiO 2 quantum devices.