Cite

Combined spectroscopic ellipsometry and attenuated total reflection analyses of Al2O3/HfO2 nanolaminates

MLA

H. Abed, et al. “Combined Spectroscopic Ellipsometry and Attenuated Total Reflection Analyses of Al2O3/HfO2 Nanolaminates.” Thin Solid Films, vol. 518, July 2010, pp. 5057–60. EBSCOhost, https://doi.org/10.1016/j.tsf.2010.02.034.



APA

H. Abed, Corentin Jorel, Corentin Vallée, M. Bonvalot, Catherine Dubourdieu, E. Gourvest, & M. Kahn. (2010). Combined spectroscopic ellipsometry and attenuated total reflection analyses of Al2O3/HfO2 nanolaminates. Thin Solid Films, 518, 5057–5060. https://doi.org/10.1016/j.tsf.2010.02.034



Chicago

H. Abed, Corentin Jorel, Corentin Vallée, M. Bonvalot, Catherine Dubourdieu, E. Gourvest, and M. Kahn. 2010. “Combined Spectroscopic Ellipsometry and Attenuated Total Reflection Analyses of Al2O3/HfO2 Nanolaminates.” Thin Solid Films 518 (July): 5057–60. doi:10.1016/j.tsf.2010.02.034.