Back to Search Start Over

Piezoelectric MEMS Linear Motor for Nanopositioning Applications

Authors :
Abdallah Ababneh
José Luis Sánchez-Rojas
Helmut Seidel
Víctor Ruiz-Díez
J. Hernando-García
J. Toledo
Source :
Actuators, Vol 10, Iss 36, p 36 (2021), Actuators, Volume 10, Issue 2
Publication Year :
2021
Publisher :
Universität des Saarlandes, 2021.

Abstract

This paper reports the design, fabrication, and performance of piezoelectric bidirectional conveyors based on microelectromechanical systems (MEMS) and featuring 3D-printed legs in bridge resonators. The structures consisted of aluminum-nitride (AlN) piezoelectric film on top of millimeter-sized rectangular thin silicon bridges and two electrode patches. The position and size of the patches were analytically optimized for travelling or standing wave generation, while the addition of 3D-printed legs allowed for a controlled contact and amplified displacement, a further step into the manufacturing of efficient linear motors. Such hybrid devices have recently demonstrated the conveyance of sliders of several times the motor weight, with speeds of 1.7 mm/s by travelling waves generated at 6 V and 19.3 kHz. In this paper both travelling and standing wave motors are compared. By the optimization of various aspects of the device such as the vibrational modes, leg collocation and excitation signals, speeds as high as 35 mm/s, and payloads above 10 times the motor weight were demonstrated. The devices exhibited a promising positional resolution while actuated with only a few sinusoidal cycles in an open-loop configuration. Discrete steps as low as 70 nm were measured in the conveyance of 2-mg sliders.

Details

Language :
English
Database :
OpenAIRE
Journal :
Actuators, Vol 10, Iss 36, p 36 (2021), Actuators, Volume 10, Issue 2
Accession number :
edsair.doi.dedup.....310ffabfa7c4418713ad81c0383b9dcc
Full Text :
https://doi.org/10.22028/d291-33445