Back to Search
Start Over
Piezoelectric MEMS Linear Motor for Nanopositioning Applications
- Source :
- Actuators, Vol 10, Iss 36, p 36 (2021), Actuators, Volume 10, Issue 2
- Publication Year :
- 2021
- Publisher :
- Universität des Saarlandes, 2021.
-
Abstract
- This paper reports the design, fabrication, and performance of piezoelectric bidirectional conveyors based on microelectromechanical systems (MEMS) and featuring 3D-printed legs in bridge resonators. The structures consisted of aluminum-nitride (AlN) piezoelectric film on top of millimeter-sized rectangular thin silicon bridges and two electrode patches. The position and size of the patches were analytically optimized for travelling or standing wave generation, while the addition of 3D-printed legs allowed for a controlled contact and amplified displacement, a further step into the manufacturing of efficient linear motors. Such hybrid devices have recently demonstrated the conveyance of sliders of several times the motor weight, with speeds of 1.7 mm/s by travelling waves generated at 6 V and 19.3 kHz. In this paper both travelling and standing wave motors are compared. By the optimization of various aspects of the device such as the vibrational modes, leg collocation and excitation signals, speeds as high as 35 mm/s, and payloads above 10 times the motor weight were demonstrated. The devices exhibited a promising positional resolution while actuated with only a few sinusoidal cycles in an open-loop configuration. Discrete steps as low as 70 nm were measured in the conveyance of 2-mg sliders.
- Subjects :
- Control and Optimization
Fabrication
Materials science
Acoustics
bidirectional linear motion
02 engineering and technology
01 natural sciences
Displacement (vector)
Standing wave
Resonator
lcsh:TK1001-1841
0103 physical sciences
lcsh:TA401-492
traveling wave
AlN
nanopositioning
010302 applied physics
Microelectromechanical systems
conveyor
Linear motor
021001 nanoscience & nanotechnology
Piezoelectricity
lcsh:Production of electric energy or power. Powerplants. Central stations
MEMS
Control and Systems Engineering
standing wave
Electrode
lcsh:Materials of engineering and construction. Mechanics of materials
piezoelectric
0210 nano-technology
Subjects
Details
- Language :
- English
- Database :
- OpenAIRE
- Journal :
- Actuators, Vol 10, Iss 36, p 36 (2021), Actuators, Volume 10, Issue 2
- Accession number :
- edsair.doi.dedup.....310ffabfa7c4418713ad81c0383b9dcc
- Full Text :
- https://doi.org/10.22028/d291-33445