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Coherent Ray Tracing Simulation Of Non-Imaging Laser Beam Shaping With Multi-Aperture Elements
- Source :
- EPJ Web of Conferences, Vol 215, p 01001 (2019)
- Publication Year :
- 2019
- Publisher :
- EDP Sciences, 2019.
-
Abstract
- The application of laser light sources for illumination tasks like in mask aligner lithography relies on non-imaging optical systems with multi-aperture elements for beam shaping. When simulating such systems, the traditional approach is to separate the beam-shaping part (incoherent simulation) from dealing with coherence properties of the illuminating laser light source (diffraction theory with statistical treatment). We present an approach using Gaussian beam decomposition to include coherence simulation into ray tracing, combining these two parts, to get a complete picture in one simulation. We discuss source definition for such simulations, and verify our assumptions on a well-known system. We then apply our approach to an imaging beam shaping setup with microoptical multi-aperture elements. We compare the simulation to measurements of a similar beam-shaping setup with a 193 nm continuous-wave laser in a mask-aligner configuration.
- Subjects :
- Diffraction
Physics
business.industry
QC1-999
02 engineering and technology
021001 nanoscience & nanotechnology
Laser
01 natural sciences
law.invention
010309 optics
Ray tracing (physics)
Optics
law
0103 physical sciences
Physics::Accelerator Physics
Beam shaping
0210 nano-technology
business
Lithography
Laser beams
Coherence (physics)
Gaussian beam
Subjects
Details
- ISSN :
- 2100014X
- Volume :
- 215
- Database :
- OpenAIRE
- Journal :
- EPJ Web of Conferences
- Accession number :
- edsair.doi.dedup.....2e2ab2b5fa35873aaeea09a5ed935c50
- Full Text :
- https://doi.org/10.1051/epjconf/201921501001