Characterization by OCT of a new kind of micro-interferometric components for the NanoCarb miniature imaging spectrometer

International audience; In this paper, we describe the NanoCarb concept as well as its key elements. Then we will explain the design of the prototype followed by the development of characterization techniques. Finally, we will present how this tool can be used as part of end-to-end model. The key element of the NanoCarb concept is a matrix of silicon Fabry-Perot micro-interferometers, which allows us to perform both imaging and interferometry with a field of view of 18° and several interferometric samples in a snapshot. This technique permits us to optimize the SNR for a much reduced volume. The very complex and unusual design of this component brings huge optical and technological challenges, and requires the development of characterization techniques at the nanometer scale. Upon achievement of this purpose, the next step will be the integration of this matrix in a NanoCarb prototype to demonstrate its effective performances. We present a test bench using the interferential metrology technique of Optical Coherence Tomography (OCT). In a first time, we managed to obtain optical path maps of different silicon wafers with nanometer accuracy. Then, we employed the technique to characterize the first micro-interferometers. In parallel, we realized the first prototype integration of NanoCarb with an InGaAs focal plane array and started its characterization