Back to Search
Start Over
Nanostructuring polymers by soft lithography templates realised via ion sputtering
- Source :
- Nanotechnology (Bristol, Online) 16 (2005): 2714–2717. doi:10.1088/0957-4484/16/11/041, info:cnr-pdr/source/autori:Elisa Mele; Francesca Di Benedetto; Roberto Cingolani; Dario Pisignano; Andrea Toma; Francesco Buatier de Mongeot; Renato Buzio; Corrado Boragno; Giuseppe Firpo; Valentina Mussi; Ugo Valbusa;/titolo:Nanostructuring polymers by soft lithography templates realized via ion sputtering/doi:10.1088%2F0957-4484%2F16%2F11%2F041/rivista:Nanotechnology (Bristol, Online)/anno:2005/pagina_da:2714/pagina_a:2717/intervallo_pagine:2714–2717/volume:16
- Publication Year :
- 2005
- Publisher :
- Bristol, United Kingdom: IOP Publishing Limited, 2005.
-
Abstract
- We demonstrate that a combination of ion sputtering and soft lithography is an alternative and effective way of nanostructuring soft matter. We create self-organized nanoscale structures on a glass template by irradiating the surface with a defocused, low energy Ar ion beam. Capillary force lithography is then used to transfer the pattern, exploiting the glass transition of polymeric layers. In particular, we demonstrate the pattern transfer of a periodic 150 nm ripple structure onto an organic compound. This new, unconventional combination is then a low-cost strategy that opens the way to a variety of applications in the field of organic-based devices.
- Subjects :
- Materials science
Ion beam
Mechanical Engineering
Bioengineering
Nanotechnology
General Chemistry
Soft lithography
Multilayer soft lithography
Mechanics of Materials
General Materials Science
X-ray lithography
Soft matter
Electrical and Electronic Engineering
Glass transition
Lithography
Next-generation lithography
Subjects
Details
- Language :
- English
- Database :
- OpenAIRE
- Journal :
- Nanotechnology (Bristol, Online) 16 (2005): 2714–2717. doi:10.1088/0957-4484/16/11/041, info:cnr-pdr/source/autori:Elisa Mele; Francesca Di Benedetto; Roberto Cingolani; Dario Pisignano; Andrea Toma; Francesco Buatier de Mongeot; Renato Buzio; Corrado Boragno; Giuseppe Firpo; Valentina Mussi; Ugo Valbusa;/titolo:Nanostructuring polymers by soft lithography templates realized via ion sputtering/doi:10.1088%2F0957-4484%2F16%2F11%2F041/rivista:Nanotechnology (Bristol, Online)/anno:2005/pagina_da:2714/pagina_a:2717/intervallo_pagine:2714–2717/volume:16
- Accession number :
- edsair.doi.dedup.....2ba51164d0c24cc55d471347912060d1